Inrfucirvine
The Integrated Nanosystems Research Facility at The University of California, Irvine (INRF UCI) is dedicated to developing and promoting micro and nano technology through research, education and outreach.
The facility is a 8,600 square foot class 100/1,000/10,000 clean room equipped with all the major devices for micro and nano fabrication. Capabilities include such diverse disciplines such as MEMS, biology, chemistry, optics and physics equipped with all the major devices for micro and nano fabrication.
BiON Gowning Proceedures
Kyosei USA, Inc - 3D Photo Etching
Ushio Inc. Photo Bonding System - Standard Operating Procedures
Trion ICP / RIE Dry Etch - Standard Operating Procedures
Hot Plates and Ovens - Proper Procedures and Safety in Clean Room Facility
AB&M UV Flood Exposure System
XeF2 Pulsing Etcher - How to prepare the sample
XeF2 Pulsing Etcher - Standard Operating Procedures
CHA Mark 50 Sputtering and Evaporation Standard Operating Procedures
First Nano Furnace (EasyTube 3000 System) Standard Operating Procedures
E-Beam 1 Evaporation - Running & Unloading (CHA Electron Beam)
E-Beam 1 Evaporation - Introduction & Loading Procedures (CHA Electron Beam)
Introduction to Photolithography - ( Negative or Positive Photoresist )
Atomic Layer Deposition (ALD) - Standard Operating Procedures
Karl Suss MA6 - Backside and Topside Alignment
STS System DRIE - Loading Substrate into the Etch Chamber
STS System DRIE - Standard Operating Procedures
HMDS Oven - Standard Operating Procedures
Applied MST MVD 100 - Standard Operating Procedures
Karl Suss MA6 Mask Aligner - Standard Operating Procedures
Wet Benches - Standard Operating Procedures
Gowning Procedures at INRF / BiON Cleanrooms
Integrated Nanosystems Research Facility at UC Irvine
Plasmatherm PECVD Procedure
LifeChips at UC Irvine
INRF BION Micro and Nano Technology at UC Irvine