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Telecentric illumination

Автор: idonus sàrl

Загружено: 2022-05-17

Просмотров: 4547

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In this tutorial video, we demonstrate how to make a telecentric illumination using an LED and plano-convex lenses.

Telecentric illumination is a key characteristic for photomask-based photolithography (1:1 scale projection of micropatterns). It is one of the features of the idonus UV-LED exposure systems aimed for photolithography (UV-EXP product line).

Telecentricity is also of prime importance in machine vision as it minimizes perspective error (parallax), ensuring accurate measurements in gauging applications. In machine vision, telecentric lenses are found on both the illumination source and the imaging system (camera).

--
Material used on the optical bench:
White LED: Flashlight (Ledlenser), without its optics
Lenses: Plano-convex lenses borrowed from the UV-EXP150R (idonus)
Motorized slider: Shark slider nano (iFootage)
Spectrometer: Flame UV-VIS (Ocean Insight)

--
Ray tracing simulation software:
"Tantalum - 2D Light Transport" by Benedikt Bitterli
https://benedikt-bitterli.me/tantalum...
Many thanks to ‪@Thunabrain‬

Note: Lenses have been superimposed for illustrative purposes.

To download the technical guide mentioned in the video and to learn more
about the idonus UV-EXP product line, visit this URL:
https://www.idonus.com/UV-EXP

Telecentric illumination

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