Cryogenic Wafer Prober Autoloader
Автор: Bluefors
Загружено: 2023-11-10
Просмотров: 1384
The Cryogenic Wafer Prober allows wafer-level testing of cryogenic quantum devices, electronics, and detectors at temperatures below 2 K measured from the surface of the wafer. It delivers a throughput up to 100 times faster than commonly used cryogenic chambers, and supports volume probing for up to 300 mm wafers.
The system can be equipped with an Autoloader, for full automation using a robotic arm. Wafers are placed in a wafer magazine or FOUP for the handling robot to retrieve and install them into the Load Lock. The integrated Wafer Pre-Aligner makes sure that the wafer orientation is correct before the wafer is moved into the Load Lock, and from there to the Vacuum Chamber to be tested.
Watch the video to see the system in action.
Learn more about the Cryogenic Wafer Prober here: https://bluefors.com/products/the-cry....
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