Sam Sivakumar of Intel talks about Lithography and Patterning: Part 2
Автор: nanolearning
Загружено: 2012-10-17
Просмотров: 25261
Sam Sivakumar of Intel talks about Lithography and Patterning
Issues with Double Patterning
EUV
Challenges with EUV lithography and their status
Stanford University's class on nanomanufacturing, led by Aneesh Nainani.
Oct 3, 2012
Week 2, Lecture 4, Part 2
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