[Materials] Ar Ion Beam processing of MultiLayer Ceramic Capacitor (MLCC)

Cross section of multilayer ceramic capacitor (MLCC) was prepared by FIB and then processed by Ar Ion Beam (ArIB). While FIB prepared section shows blurry dielectric grain, ArIB processed one exhibits strong channeling contrast. FIB-induced damaged can be removed by ArIB integrated in FIB-SEM-Ar Triple Beam system without exposing the sample to air.
#MultiLayerCeramicCapacitor #MLCC #FIB #ArIonBeam #FIB-SEM #TripleBeam #electronmicroscopy #ElectronMicroscope

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FIB-SEM-Ar Triple Beam system
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