Repair of a variant of the MKS 253b exhaust valve used in a Semicon tool

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At ERD we have been involved in the repair of complex electronic systems used in a variety of manufacturing industries for decades. Because of our success in designing test systems and developing solutions for complex problems ERD now works closely with a number of Semiconductor facilities to work on more mechanical oriented items.

One of the recent cases of this type of mechanical repair is on a MKS Exhaust throttle valve used in many Semiconductor tools.

These MKS valves come in various versions which have different speeds and mechanical dimensions, this one being the 253b-15665.

The 253B Exhaust Throttle Valve regulates the removal of gas from a processing system. Its flapper is positioned to modulate gas flow, thereby controlling process pressure. The 253 has a patented non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control.

This valve came to ERD with worn out mechanicals which we fabricated as new. We also developed a procedure to align and fully test these valves prior to returning them in to service.

As shown in this video we can open and close the valve at any level and can now send this valve back to our customer for in service use.

At ERD we are the repair company that takes on new challenges every day as we keep the world running one repair at a time!

#repair #semiconductor #technology