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MOCVD System, Sic Graphite epitaxy susceptors
Автор: vet-china
Загружено: 2022-04-20
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Sic Graphite epitaxy susceptors
A wafer needs to pass through several steps before it is ready for use in electronic devices. One important process is silicon epitaxy, in which the wafers are carried on graphite susceptors. The properties and quality of the susceptors have a crucial effect on the quality of the wafer’s epitaxial layer.
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