Maskless Wafer Stepper Part1: Optics

I've been planning to make a maskless wafer stepper for a long time. In the last few months, I finally found the time! This video is the first of 3 video's on the design- and build process. It discusses the optical aspects of the machine.

0:00 General intro
0:38 About Wafer steppers in general
1:12 Meta surfaces and flat optics
2:00 Principle and advantages of a maskless wafer stepper
4:36 Projection optics
6:47 Global layout of the machine
8:50 System overview

I hope to make micro optics with this machine in the near future. By the way, not the standard meta surfaces, because the resolution will be too limited for that, but meta surfaces that combine both refractive and diffractive functionality. Currently I'm still in the building process of the machine and the software.

I have taken the liberty of using a few short clips in my video. Please give the makers credit by visiting the original video's or websites if you are want to know more:
ASML video on EUV-wafer steppers:
   • ASML - Powering the Next Phase of Semicond...  
Great video by science magazine with entry level info on meta surfaces
   • Shrinking microscope lenses  
If you want to go a little deeper:
   • Molding Optical Wavefronts: Flat Optics ba...  
   • Flat Metasurface Optics - A. Faraon - 1/17...  
   • Nanophotonics & Metamaterials L1.3: Metasu...  

By the way, the Nikon objective was bought at https://www.ebay.nl/usr/avr-sales. They gave me a very good price and exceptional service, so make sure to check them out for used tech stuff.