Surface Micromachining Overview
Автор: Support Center for Microsystems Education
Загружено: 2012-06-20
Просмотров: 30229
This is an overview of the surface micromachining processes used to fabricate micro-sized devices such as cantilevers, gears, accelerometers, digital mirrors and switches. This presentation was produced by the Southwest Center for Microsystems Education (SCME). Supporting materials can be downloaded from the SCME website (http://scme-nm.org).
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