Fabrication of Acoustic Wave Devices on Lithium Niobate|Protocol Preview

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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate - a 2 minute Preview of the Experimental Protocol

Jiyang Mei, Naiqing Zhang, James Friend
University of California San Diego, Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine;

Two fabrication techniques, lift-off and wet etching, are described in producing interdigital electrode transducers upon a piezoelectric substrate, lithium niobate, widely used to generate surface acoustic waves now finding broad utility in micro to nanoscale fluidics. The as-produced electrodes are shown to efficiently induce megahertz order Rayleigh surface acoustic waves. 

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