Introduction to Photolithography - ( Negative or Positive Photoresist )
Автор: Inrfucirvine
Загружено: 2014-05-30
Просмотров: 69318
Carlos gives you an introduction to Photolithography in the cleanroom of the Integrated Nanosystems Research Facility at UC Irvine.
View the SOP documentation for the Laurell Photoresist Spinner
http://www.inrf.uci.edu/sop-laurell-s...
To skip to any portion of this video, refer to the below chapters:
0:00:12 - Introduction
0:01:21 - Laurel Spinner: Logging in and pre-use examination
0:05:33 - Laurel Spinner: Loading a sample
0:08:59 - Laurel Spinner: Programming the spin speeds and running the tool
0:11:51 - Laurel Spinner: Unloading and baking
0:14:10 - Laurel Spinner: Clean up after processing
0:18:42 - Post spinning procedures
0:19:13 - Development of Su-8
0:22:20 - Disposal of waste
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