MEMS Fabrication Techniques

Introduction to Microfabrication techniques including deposition, photo lithography, micromachining, RIE, DRIE and LIGA.

This video explains basics of how micro electro mechanical systems are fabricated. Stay hooked to know all you need to.

Also make sure to watch Introduction to MEMS at    • What are Micro electromechanical systems? ...  

Microfabrication is the process of fabricating miniature structures of micro meter scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication".
Microfabrication comes under mechatronic engineering and is essential for mechanical as well as electronic engineers. Several projects and seminars are conducted on this topic.

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Chapters
0:00 Intro
0:13 MEMS Fabrication Overview
1:03 Deposition Techniques
3:08 Lithography
5:08 Micromachining
7:13 Reactive Ion Etching
8:13 LIGA
8:53 Outro