DTU Nanolab
DTU Nanolab is the National Centre for Nanofabrication and Characterization, a fair access facility allowing industry and academia to exploit the possibilities of nanofabrication and atomic resolution characterization by providing state-of-the-art equipment and expertise.
DTU Nanolab Phase 4 - LEGO
Chemical Storage Rooms - DTU Nanolab
Working with chemistry in building 346
Nanolab introduction course: Safety in the Cleanroom / Sikkerhed i renrum
Working with chemicals in the cleanroom at DTU Nanolab
Lithography tool package training 6 – Post-lithography steps
Lithography tool package training 5 – Resist, substrates, and pre-treatment
Lithography tool package training 4 – Development
Lithography tool package training 3 – Exposure
Lithography tool package training 2 – Coating
Lithography tool package training 1 – Introduction
CleWin 5 introduction
Cleanroom safety building 346
Dry Etch TPT Lecture - 6 Equipment for dry etching at Nanolab
Dry Etch TPT Lecture - 5b Chamber conditioning and RF matching
Dry Etch TPT Lecture - 5 Process tuning – process parameters
Dry Etch TPT Lecture - 4 Etch Characteristics
Dry Etch TPT Lecture - 3b The Bosch process
Dry Etch TPT Lecture - 3 Etch Mechanisms
Dry Etch TPT Lecture - 1 Motivation
Dry Etch TPT Lecture - 2 Etch plasma and equipment layout
Dry Etch TPT Lecture - 0 Introduction to Dry Etch Equipment
Dry Etch TPT Training - ASE and AOE software: #4 The Bosch process
Dry Etch TPT Training - ASE and AOE software: #7 Process log
Dry Etch TPT Training - ASE and AOE software: #6 Removing a wafer from the load lock
Dry Etch TPT Training - ASE and AOE software: #5 Run a process
Dry Etch TPT Training - ASE and AOE software: #3 Recipe editor
Dry Etch TPT Training - ASE and AOE software: #2 Load and transfer
Dry Etch TPT Training - ASE and AOE software: #1 intro
Dry Etch TPT Training – ICP’s and Pegasus software: #5 Automatic processing at the DRIE-Pegasus