Ion beam technology for thin piezoelectric films

Piezoelectric films are used in a wide range of applications, such as transducers for example in microphones, motors and resonators. The coated resonators are mainly used as frequency filters in modern mobile communications and require an excellent quality of piezoelectric coating. In his presentation, Karl Gündel, Technical Sales Manager at scia Systems, will talk about the advantages of ion beam technology in the production of these piezoelectric layers.

At first, he will show you the technology of ion beam milling for structuring of piezoelectric materials. The next technology is ion beam trimming, which provides a homogeneous layer thickness on the wafer. The third technology for the production of piezoelectric layers is ion beam sputtering, which produces very dense, defect-free deposited films.
For all technologies, Karl Gündel will present the suitable equipment and it’s features and benefits.


Do you want to know more or speak to one of our experts? Contact us: https://www.scia-systems.com/contact/...


About scia Systems
The company was founded 2013 and is located in Chemnitz, Germany. As manufacturer of precise surface processing equipment, based on advanced ion beam and plasma technologies, scia Systems established itself in a very short time on the worldwide market. Our customers are companies and research institutes, mainly in the field of microelectronics, MEMS, and precision optics manufacturing.

scia Systems stands for highly reliable equipment to meet expectations for today and the future. To ensure our high standards, we work closely with our customers to optimize tool performance and meet the future roadmap requirements.