Ion Beam and Plasma Technology for MEMS Production

Expertise in MEMS Manufacturing: Coating-, Etching- and Cleaning-Processes by scia Systems

With our advanced vacuum processing equipment, we enable manufacturers worldwide to produce micro- and nanoelectronic devices to the highest standard. Our technologies for thin film coating, dry etching and precision cleaning are essential for applications in smart sensors, high-frequency electronics, power electronics and advanced electronics packaging.

Technologies featured in the video:
00:00 Start
00:00 Trendsetting mobile communication by improving RF-filter production by frequency trimming with scia Trim 200
00:25 Technology of ion beam trimming
01:08 Improving Photonic Integrated Circuits (PIC) by ion beam processing of waveguides
01:27 Creating an extended reality by structuring of micro-optics
01:29 Enabling failure analysis and reverse engineering with precise layer-by-layer material removal
01:37 Enhancing sensor technology with increased sensitivity & energy-efficency
01:45 Structuring of TMR Sensors via ion beam etching
02:48 scia Systems – Innovation that drives research and industry forward


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About scia Systems
Founded in 2013, scia Systems is a technology leader in thin-film process equipment based on advanced ion beam and plasma technologies. The systems are used for coating, etching, and cleaning processes with nanometer-resolution and have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries. For more information, visit the company’s website at www.scia-systems.com.